Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is Radial Line Slot Antennas - Home - Springer Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays Impact of static magnetic fields on the radial line slot ... The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies.
The plasma source 130 comprises a surface wave plasma (SWP) source, such as a radial line slot antenna (RLSA), to be discussed below. As seen in FIG. 1A, the plasma processing system 100 comprises a gas supply system 135 coupled to the processing chamber 110 and configured to introduce a process gas to process space 115. During dry plasma ...
Analysis of a high power microwave radial line slot … A traditional radial line slot antenna (RLSA) is a high gain planar array. To improve the power handling capacity, we design a radial line slow wave structure whichThis high power microwave (HPM) RLSA is fed from a double-layered radial line waveguide to realize the directional radiation of the microwave. Low-cost monopulse radial line slot antenna - IEEE… The antenna is a radial line slot antenna (RLSA), with the slots placed on the upper plate in concentric rings. The radiating element is a slot pairThese feeding networks include a Butler Matrix Network. Comparing both radiation patterns, amplitude and phase, theta and phi angles of arrival...
A radial line slot antenna without a slow wave structureDocuments. Application of the ECR slot antenna plasma source for ion implantationDocuments.Micro-strip line feed I shaped slot Antenna with finite ... and slot antenna were successfully used to achieve the required antenna performances.
The plasma produced by a radial line slot antenna (RLSA) source is discussed based on a simulation using a multiphysics coupled 2D fluid model. The technological aspects in a silicon nitride chemical vapor deposition (CVD) process using a disilane and ammonia mixture are addressed. Conformal doping of topographic silicon structures using a ... Fin extension doping for 10 nm front end of line technology requires ultra-shallow high dose conformal doping. In this paper, we demonstrate a new radial line slot antenna plasma source based doping process that meets these requirements. US Patent for Plasma doping apparatus and plasma doping ... Disclosed is a plasma doping apparatus provided with a plasma generating mechanism. The plasma generating mechanism includes a microwave generator that generates microwave for plasma excitation, a dielectric window that transmits the microwave generated by the microwave generator into a processing container, and a radial line slot antenna formed with a plurality of slots. PAPER A Full-Wave Analysis of a Complete Model for a Radial ... IEICE TRANS. COMMUN., VOL.E82{B, NO.1 JANUARY 1999 165 PAPER A Full-Wave Analysis of a Complete Model for a Radial Line Slot Antenna Tetsuya YAMAMOTO y, Student Member, Jiro HIROKAWAy, and Makoto ANDO , Members
An integrated planar antenna-mixer device for microwave reception utilizes a slot-ring antenna and a diode quad connected thereto. The device comprises a planar metallic sheet backed on one side by a dielectric layer.
A thruster has a main chamber (6) defining an axis (4) of thrust. The thruster has means adapted to provide ionizable propellant within the main chamber (6) and an ionizer (124) adapted to ionize the injected gas within the main chamber (6 … US8982011B1 - Conformal antennas for mitigation of structural… FIG. 3 a illustrates conceptually the method the invention uses to mitigate the antenna blockage problem discussed with reference to FIG. 1 a. The antenna originally used on the aircraft 1 is replaced with a Artificial Impedance Surface …
On the Near-Field Shaping and Focusing Capability of a Radial ...
US6388632B1 - Slot antenna used for plasma surface processing ... As is well known, a typical radial line slot antenna utilized in a plasma surface processing apparatus is provided with a metal antenna guide (made of e.g. aluminum) and a disklike dielectric member (made of e.g. quartz or alumina ceramic) supported by the antenna guide.
In radio and telecommunications a dipole antenna or doublet [1] is the simplest and most widely used class of antenna. [2] [3] The dipole is any one of a class of antennas producing a radiation pattern approximating that of an elementary …