This paper presents a high-gain radial line slot array (RLSA) antenna. This single-layer circularly polarised RLSA antenna has been designed with several thousand of slots on the radiating aperture. The far-field results indicate excellent pattern qualities including a peak gain of 36.7 dBic at 21.2 GHz. Measurement of the electron temperature on microwave surface… Electron temperature measurement in a slot antenna 2.45 GHz microwave plasma source. Journal of Vacuum Science & Technology B [IF: 1.31].Characteristics of Pulsed Surface Wave Oxygen Plasma Generated by Ring- Slot Antenna. Radial Line Slots Array Antenna (RLSA) Performance based… Description. This paper suggests the importance of dielectrics materials in the optimization of RLSA antennas. Simulations of Ku band (11-14) GHz 20 degree beam squinted RLSA designs on CST 2010 using different dielectric constants between ?r= 1.4 and ?r = 3.0 is done in this submission. Antenna and plasma processing apparatus - tokyo electron… The feature of the microwave plasma generated by the radial line slot antenna is that the plasma of energy having a relatively high electron temperatureAs described above, the plasma processing apparatus using the antenna having any one of the slot plates and the dielectric windows described...
A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a ...
Beam broadened radial line slot array antenna for... Characteristics of a Radial Line Slot Antenna for 12 GHz Band Satellite TV Reception. IEEE Transactions on Antennas and Propagation.High Gain Radial Line Slot Antennas for Millimetre Wave Applications," IEE Proceedings Microwaves, Antennas and Propagation. Analysis of a high power microwave radial line slot … A traditional radial line slot antenna (RLSA) is a high gain planar array. To improve the power handling capacity, we design a radial line slow wave structure which replaces a traditional dielectric sheet in the radial waveguide of the traditional RLSA. This high power microwave (HPM) RLSA is fed from a... Low sidelobes for radial line slot antennas Low sidelobes for radial line slot antennas. A New Improvement of Radial Line Slot Antenna
density plasma can form with an ion sheath layer along the antenna. Then the microwave was fed into the coaxial wave-guide from the right side of the system. Now the input microwave power could propagate easily along the negative biased antenna and surface wave excited plasma generated along the antenna inside the chamber.
Disclosed is a plasma doping apparatus provided with a plasma generating mechanism. The plasma generating mechanism includes a microwave generator that generates microwave for plasma excitation, a dielectric window that transmits the microwave generated by the microwave generator into a processing container, and a radial line slot antenna formed with a plurality of slots. PAPER A Full-Wave Analysis of a Complete Model for a Radial ... IEICE TRANS. COMMUN., VOL.E82{B, NO.1 JANUARY 1999 165 PAPER A Full-Wave Analysis of a Complete Model for a Radial Line Slot Antenna Tetsuya YAMAMOTO y, Student Member, Jiro HIROKAWAy, and Makoto ANDO , Members Radial Line Slot Antenna Design for Monopulse Space Debris Radar
Radial Line Slot Antennas - Home - Springer
The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity controlLarge volume diffusion plasmas, of which the radial line slot antenna source is one type, must overcome transport effects or diffusion modes... Radial line slot antenna plasma source
The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature.
A tapered slot plane antenna apparatus for a millimeter wave radio communication system which provides a tapered pattern composed by utilizing a Fermi-Diac distribution function so as to consider an i US4792810A - Microwave antenna - Google Patents
Computational modeling study of the radial line slot ... The radial line slot antenna plasma source is a high-density microwave plasma source comprising a high electron temperature source region within the plasma skin depth from a coupling window and low electron temperature diffusion region far from the window. The plasma is typically comprised of inert gases like argon and mixtures of halogen or fluorocarbon gases for etching. Radial line slot antenna having a conductive layer - Tokyo ...